• 专利附录
  • 专利说明
  • 权利要求
  • 类似技术
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    • 专利摘要:
    The present invention relates to a majority-current-assisted detector device, comprising a semiconductor layer of a first conductivity type, at least two control regions of the first conductivity type, at least a detection region of a second conductivity type opposite to the first conductivity type, and a source for generating a majority carrier current associated with an electric field, characterized in that it further comprises isolation means formed in the semiconductor layer and located between said two control regions, for deflecting the first majority carrier current generated by the first source between said two control regions and thus increasing the length of the first majority current path, reducing the amplitude of said first carrier current majority and, therefore, reduce the energy consumption of the detector device.
    公开号:BE1024783B1
    申请号:E2017/5012
    申请日:2017-01-12
    公开日:2018-07-02
    发明作者:Kyriaki Korina Fotopoulou；Der Tempel Ward Van；Nieuwenhove Daniel Van
    申请人:Sony Depthsensing Solutions；Softkinetic Sensors Nv；Softkinetic International；
    IPC主号:
    专利说明:

    (30) Priority data:
    (73) Holder (s):
    SOFTKINETIC SENSORS NV 1050, BRUXELLES Belgium (72) Inventor (s):
    FOTOPOULOU KYRIAKI Korina
    1200 BRUSSELS
    Belgium
    VAN DER TEMPEL Ward 3140 KEERBERGEN Belgium
    VAN NIEUWENHOVE Daniel 1981 HOFSTADE Belgium (54) Detector device with majority current and insulation means (57) The present invention relates to a detector device assisted by majority current, comprising a semiconductor layer of a first type of conductivity , at least two control regions of the first type of conductivity, at least one region of detection of a second type of conductivity opposite to the first type of conductivity, and a source for generating a current of majority carriers associated with an electric field, characterized by the fact that it further comprises isolation means formed in the semiconductor layer and situated between said two control regions, for deflecting the first majority carrier current generated by the first source between said two control regions and, thus, increasing the length of the path of the first major current, reducing the amplitude of said first current of po majority rtors and therefore reduce the energy consumption of the detector device.
    BELGIAN INVENTION PATENT
    FPS Economy, SMEs, Middle Classes & Energy
    Publication number: 1024783 Deposit number: BE2017 / 5012
    Intellectual Property Office International Classification: H01L 27/146 Date of issue: 02/07/2018
    The Minister of the Economy,
    Having regard to the Paris Convention of March 20, 1883 for the Protection of Industrial Property;
    Considering the law of March 28, 1984 on patents for invention, article 22, for patent applications introduced before September 22, 2014;
    Given Title 1 “Patents for invention” of Book XI of the Code of Economic Law, article XI.24, for patent applications introduced from September 22, 2014;
    Having regard to the Royal Decree of 2 December 1986 relating to the request, the issue and the maintenance in force of invention patents, article 28;
    Given the patent application received by the Intellectual Property Office on January 12, 2017.
    Whereas for patent applications falling within the scope of Title 1, Book XI of the Code of Economic Law (hereinafter CDE), in accordance with article XI. 19, §4, paragraph 2, of the CDE, if the patent application has been the subject of a search report mentioning a lack of unity of invention within the meaning of the §ler of article XI.19 cited above and in the event that the applicant does not limit or file a divisional application in accordance with the results of the search report, the granted patent will be limited to the claims for which the search report has been drawn up.
    Stopped :
    First article. - It is issued to
    SOFTKINETIC SENSORS NV, Boulevard de la Plaine 11, 1050 BRUXELLES Belgium;
    represented by
    OFFICE KIRKPATRICK S.A., Avenue Wolfers 32, 1310, LA HULPE;
    a Belgian invention patent with a duration of 20 years, subject to the payment of the annual fees referred to in article XI.48, §1 of the Code of Economic Law, for: Detector device with majority current and means of insulation.
    INVENTOR (S):
    FOTOPOULOU KYRIAKI Korina, Avenue Lambeau 59, 1200, BRUXELLES;
    VAN DER TEMPEL Ward, Piervenshoek 19, 3140, KEERBERGEN;
    VAN NIEUWENHOVE Daniel, Heymansstraat 17, 1981, HOFSTADE;
    PRIORITY (S):
    DIVISION:
    divided from the basic application: filing date of the basic application:
    Article 2. - This patent is granted without prior examination of the patentability of the invention, without guarantee of the merit of the invention or of the accuracy of the description thereof and at the risk and peril of the applicant (s) ( s).
    Brussels, 02/07/2018, By special delegation:
    BE2017 / 5012
    DETECTOR DEVICE WITH MAJORITY CURRENT AND
    MEANS OF INSULATION
    Technical field of the invention
    The invention relates to a majority current assisted detector device for detecting electromagnetic radiation incident on a semiconductor layer, a current of majority carriers being generated between two control regions and minority photogenerated carriers being directed towards a detection region. under the influence of an electric field generated between the control regions.
    The invention can be used in imagers, in particular time of flight imagers.
    Invention background
    Nowadays, more and more detection devices use time-of-flight technologies (DID) to obtain depth information. A basic time-of-flight camera (DUT) system 3 is illustrated in Figure 1. DDT camera systems capture 3D images of a scene 15 by analyzing the time of flight of light from a light source 18 to an object. A DDT camera system 3 comprises a camera, with a dedicated lighting unit 18 and data processing means 4.
    The operating principle of a DDT camera system consists in actively lighting the scene 15 with modulated light 16 at a predetermined wavelength using the dedicated lighting unit, for example 2 BE2017 / 5012 example with certain light pulses of at least a predetermined frequency. The modulated light is reflected back by objects in the scene. A lens 2 collects the reflected light 17 and forms an image of the objects on an imaging sensor 1 of the camera. According to. distance of objects from. camera, a delay appears between the emission of the modulated light, for example said light pulses, and the reception at the level of the camera of these light pulses. A distance between reflective objects and the camera can be determined based on the observed time delay and the constant value of the speed of light. In another more complex and reliable embodiment, a plurality of phase differences between the emitted reference light pulses and the captured light pulses can be
    determinedestimate by measureinformation correlation ands deep. used for The determined ion of differences live can be realized e in particular by demodulates irs photon! . that s current assisted i (CAPD). The principle CAPD East
    explained in EP1513202 and illustrated by Figures 2A-C. It is based on demodulation nodes, the so-called "leads". The CAPD shown in Figures 2A — C has two leads. Each lead comprises a control region 61, 62 and a detection region 63, 64. By controlling a potential applied between the control regions 61 and 62, it is possible to control the detection capacity of the associated lead. When a photon is incident on the. photosensitive area of a pixel, an electron-hole pair e- / h + can be generated at a certain location. The electron-hole pair will be separated by an electric field which is present and
    BE2017 / 5012 which is associated with the majority current in circulation. This electric field will bring. the photogenerated minority carriers 66, 69 to drift in the direction opposite to the majority current in circulation, that is to say towards the detection regions 63, 64, respectively.
    When a pixel comprises several leads and when a positive potential is applied to a lead compared to the other leads, this lead is. activated and will receive the. majority of carriers shown command signals, achieved obtained.
    minority photogenerated in the pixel, as in Figures 2B and C. By applying appropriate control over the regions of the correlation measures can. be and depth perception can be
    CAPDs of the prior art suffer from several disadvantages to be overcome. A first challenge in CAPDs aims to reduce the size of the pixels while avoiding a phenomenon of crosstalk, that is to say an exchange of parasitic charge between neighboring pixels. This crosstalk can indeed lead to a loss of image cruelty.
    Another challenge in CAPDs is to create a field between the control regions as high as possible so as to obtain a high detection capacity and a high demodulation contrast. This requirement implies consumption: rg:
    this is CAPD. The: vee;
    one of the main r n c o n v e n r e n t. s energy consumption P in a CAPD follows the following equation, R and AV being the resistance and the potential difference between the control regions, respectively:
    BE2017 / 5012
    The energy consumption P can be reduced, for example, by increasing the distance between the control regions so as to increase the resistance between them. However, this solution suffers from the drawback of negatively affecting the size of the device.
    Another challenge in CAPD devices aims to improve the data partitioning processes to obtain more reliable data. In fact, in regular compartmentalisation, each pixel is generally read and the information is then added. This requires more time for the higher reading count and adds reading noise several times.
    A solution remains to be proposed in order to reduce the energy consumption of the CAPDs while reducing the size of the pixels, by avoiding, a phenomenon of crosstalk between the pixels and by allowing a compartmentalization of improved data.
    Summary of the invention
    The present invention relates to a majority current assisted detector device according to claim 1.
    The means for isolating the instantaneous detector are formed in the conductor and located between two regions of the control device for controlling it.
    BE2017 / 5012 deflects the first current of majority carriers generated by the. first source between said control regions and, thus, increase the length of the path of first majority current, reduce the amplitude of said first current of majority carriers and, consequently, reduce the energy consumption of the detector device.
    Preferably, the isolation means of the detector device comprise at least one region of the isolation box. Implementing isolation box regions between pixels is known in the art of standard RGB detectors and CMOS image sensors to reduce the crosstalk phenomenon. It is. note that the insulation boxes of the present invention are implemented to reduce the energy consumption of the detector device by increasing the. length of the current path without increasing: the. distance between them. The function of the caissons in conventional RGB detectors is. totally different. It would be completely absurd for those skilled in the art to want, in an RGB detector, to increase the length of the current path since an RGB detector is not assisted by a current of majority carriers. Consequently, there was no reason to duplicate, in a CAPD, what had been implemented in a detector: RGB.
    The presence of an isolation box region between the branches actually offers the advantage that the amplitude of the current of majority carriers is. scaled down. In the absence of these isolation box barriers, high currents would begin to flow between adjacent pixels, consuming a lot
    BE2017 / 5012 energy while being largely redundant for the operation of the device. Thanks to the isolation box regions, the majority of carrier currents induced by the source are forced to circulate around these isolation barriers. The distance between adjacent control regions is thereby artificially increased and the power consumption of the device is therefore reduced. The current path which, in implementations of the prior state of the. technique, was right between the lead control regions, is. now extended by adding the vertical barriers. In addition to these barriers, the leads can now be packaged so that they are closer and the pixels can be located closer to each other.
    In other words, in order to control the detector device of the present invention, one should provide the generation of a current of majority carriers between two control regions with a deviation of said current of majority carriers by increasing the length of its path. , reducing its amplitude and, therefore, reducing the power consumption of the detector device. The step of deflecting the current of majority carriers can be obtained by forming isolation means, preferably regions of the isolation box, in the semiconductor layer between two control regions.
    Advantageously, the thickness of the semiconductor layer is. suitable for rear side lighting and. the detection region, the control regions and the isolation means are formed in the front side of the semiconductor layer. This
    BE2017 / 5012 BSI configuration comprising means of isolation between the branches makes it possible to reduce the energy consumption of the detector while reducing, the size of the pixels and avoiding a phenomenon of crosstalk between the deviations.
    The detector device of the present invention more preferably comprises a second source for generating at least one second current of majority carriers in the semiconductor layer between at least one control region, formed in the front side of the layer of semiconductor, and the back side of the semiconductor layer, said second current of majority carriers being associated with a respective second electric field, the minority carriers generated being directed towards the front side of the semiconductor layer under the influence of the second electric field respectively associated with the at least one second current of majority carriers. Thanks to this embodiment, the minority carriers generated near the rear side of the semiconductor device are more easily collected by the detection regions of the detector,
    More preferably, the detector device of the present invention further comprises a plurality of adjacent branches respectively associated with a plurality of isolation means located therebetween to deflect a plurality of first streams of associated majority carriers, each branch comprising at least a detection region and at least one control region, and control circuits designed to control the first source and
    BE2017 / 5012 order separately at least one of said first c o u r a n t s for p o r t e r s ma j o r i t a i r e s de ν i e s.
    The control circuits are advantageously designed to place two adjacent leads in a state of non-detection, by reducing or eliminating a first current of associated majority carriers, to allow the redirection of the generated minority carriers to the nearest detection region.
    With this individual and separate control, a larger pixel is artificially created and the functional pixel structure is enlarged to a larger operating area, similar to what would happen if the pixel data were compartmentalized together during post processing. This individual and distinct command has the advantage of requiring only one reading for the artificially larger pixel. In regular compartmentalisation, each pixel is generally read and the information is then added. This requires more time for the higher reading count and adds reading noise several times. These two points are improved in the suggested approach. This individual and distinct control is improved by means of isolation between the branches, since they provide very reliable insulation even with
    pixels of t very p e t, i te su r f a c e. u e s regions of box insulation device of detector O r θ g θ rc r θ invention are from preference po-l flared with a ρ o o. θ n 11. θ .. L to avoid
    channel formation on the etching surface. More preferably, the box can be covered with a
    BE2017 / 5012 insulating and filled with a conductive or semi-materialC- O Ω O LJ. Cx L- θ LJ. X "
    More preferably, an additional isolation box region is formed at the rear side of the semiconductor layer to prevent more deeply penetrating light beams from entering adjacent pixel regions.
    The first source may also be able to supply a direct current (DC) voltage, making it possible to obtain only vertical fields.
    Brief description of the drawings
    The present invention should be better understood in the light of the following description and of the s s i n s a η n e s.
    Figure 1 illustrates the basic operating principle of a DDT system;
    Figure 2A shows a top view of a device according to the prior art, Figure 2B and Figure 2C show a cross-sectional view of the device of Figure 2A with two different current conditions;
    the Figure 3 represents a fashion of X θ ci. 1 .I. S ci. t .I. Where favorite ofinvention; dispos it.i.1 : of detector ; according to the current
    the figure ; upp1éme n t a i du du represents a mode of detecting device a 1 r s a t r ο n according to the presence invention;
    BE2017 / 5012
    Figure 5 shows a family possible to use by the first source of the sign in Figure 3 / Figure 9 shows the other mode of Figure l different pixel phase configurations dan detector device according to the present invention; Figure 10 shows an embodiment of the detector device of the invention;
    Figure 11 shows an exemplary embodiment of the detector device comprising optical filters according to the present invention.
    Description of the invention
    1 / invention will be explained with reference to a substrate and a p-type epitaxial layer, but the present disclosure includes, within its framework, a complementary device by which regions p and n become regions n and p, respectively. The man of the trade) could realize moo:
    at:
    s year:
    get away from the spirit of .n wind ion.
    e rme s
    It should also be understood that p, n +, p + and p-, n well, p well, deep n well and deep p well are well known to those skilled in the art. The terms n, p, n +, p + and p- refer to ranges of doping levels in semiconductor materials well known to those skilled in the art.
    The terms n and p refer to n-doped and p-doped regions, generally regions of arsenic and boron, respectively. n +, p + refer to shallow highly doped contact regions for
    BE2017 / 5012
    WELL N and WELL P, respectively, p- refers to a lightly doped p-type region such as WELL P.
    The present invention relates to embodiments relating to both front side lighting (ESI) and rear side lighting (BSI) devices. The front side lighting and rear side lighting devices are defined with reference to the location of the circuits on the chip by comparison with the incident light. ESI means a device where the light is. incident on the same side as the circuits. With FSI, light falls on the front side of the circuits, and passes through the reading circuits and interconnects before being collected in the photodetector. On the contrary, BSI means a device where the light is incident on the other side, where the circuits are not present, that is to say on the rear side. The main idea behind using a BSI structure is that no light is lost during the passage through the circuits.
    Figure 3 shows a preferred embodiment of a detector device according to the. present invention. It should be understood that the example detector device illustrated in Figure 3 may include additional elements. In reality, many other elements could be present, such as junctions, diffusion layers, photo grids, etc. In Figure 3, only the minimum elements to be able to adequately explain and describe the features of this invention over the prior art are shown and described.
    BE2017 / 5012
    The detector device 300 of the present invention is assisted by majority current to detect electromagnetic radiation. The radiation can be any type of radiation, but preferably a light in the visible range or a r y ο η n e n t i n f r a r o u g e.
    The detector device 300 comprises a semiconductor layer 106 on which electromagnetic radiation can be incident to generate, inside the latter, majority and minority carrier pairs 121. The semiconductor layer 106 is doped with a dopant of a first type of conductivity, a p dopant in the example of the.
    Figure 3 lette c ie oe semi-c
    U ί 1U u L esu preferably doped p.
    The detector device 300 includes er
    in addition to less of them governed we are from cc munande 10 0, l'J .5 trained in the layer : from s em.i · ”C Ο Ώ QU C t θ ' ur 106. The r regions of ordered 100, 115 are doped ρ in the fashion of realized ion to title example. 1 the regions of ordered can understand idre r region of diffusion p + 100 and one well p 115, from tell e self you CT! ! θ j < a diffusion region ρ-ί- 100 and the well ts p 115 form together the region of ordered • A take .time source V ten is oven denies for q- θ n 6 r Θ r at M Q Ί ΪΊ S a first current of carriers
    majority 104 in the semiconductor layer 106 between pairs of control regions, the first rnts of majority carriers 104 being as a respective first electric field. This source V m i x can be an alternating current (AC) voltage source or
    BE2017 / 5012 a direct current (DC) voltage source, as will be explained later. This source is defined in this document as a voltage source, but can also be implemented as a current source. All the voltage sources described in the rest of this document (110, 111) could also be replaced by current sources. Although voltage sources are preferred, current sources have advantages over their output impedance and, therefore, may also have advantages.
    The detector device further comprises at least one detection region 101, 116 formed in the. semiconductor layer 10 6 and which is doped with a dopant of a second type of conductivity opposite to the first type of conductivity, i.e. an n dopant here, to form a junction and collect the generated minority carriers . In Figure 3, two detection regions 101, 116 are shown, but the invention is not limited to these and could be implemented with only one detection region, for example. Minority carriers are directed to the detection region 101, 116 under the influence of the first field
    electric respectively associated at 1 'a i i mo i r is a first y majority carrier flow s 104. The regions of detection can include a region of diffusion n + 101 and. a well n 116 of such so the region of
    diffusion n + 101 and well n 116 together form the detection regions.
    The detection regions and the control regions are associated in leads, a lead comprising at least one detection region and
    BE2017 / 5012 at least one control region. In this disclosure, it will be assumed that each pixel 125 detector 300 includes a pixel bypass 125 can include more than one example 2 leads, 4 leads includes all of the circled elements dotted 125 in FIG. 3.
    of the device of In practice, erivation (by ...). One pixel per line in f “! (·
    The detector device 300 further comprises isolation means 103, formed in the semiconductor layer 106 and located between the two control regions, for deflecting the first current of majority carriers 104 generated by the first source Væix between the control regions and therefore increase the. length of the first major current path, reduce the amplitude of said first carrier current ma j o r i t a i r e s 10 4 so ..
    and, Therefore, reduce the rgie of the device of c Reader 3 00. t ion little v e n t c o mp r e n d r e at least a i. ' iso .; Lation 103, mistletoe can be available sée
    vs:·. q Γ) 1 Y P I Q
    These cai region means at various locations between
    The isolation means, for example the isolation box regions 103, force the induced currents, that is to say the majority carrier currents 104 induced by Vmix 110, to circulate around these isolation barriers. The distance between the adjacent control regions is thus artificially increased and the energy summation of the device is thus reduced.
    The isolation box regions 103 or isolation barriers can be implemented in many different ways, for example by etching techniques, such as trench etching
    BE2017 / 5012 deep or shallow, or by using isolation barriers applied before growth of epitaxial layers. The most important thing is that they induce an electrical barrier between adjacent pixels.
    This barrier 103 can be treated in a number of ways to avoid leakage along the barrier in the form of a state:
    etched surface with leakage, insulation 103 can be deep, with surface and to avoid this, the box e, for example, an etching n insulating 1001 between the silicon surface of the etching. It may be, for example, but not limited to, a silicon oxide and,
    (But without limit) a cap of P ! in the cai its engraved, which allows cl · pot in tier or cap polysilicon forma tion of channel on- the surface c the he read s very sure Figure 4. The means of is
    e polarizes:
    in the example, the isolation box regions 103 are preferably polarized with a potential. The isolation box region or the deep isolation box region can be filled with a semiconductor or electrically conductive material so that a voltage can be applied,
    Care should be taken during the. implementation of these insulation barriers, for example in the form of a deep insulation box. The creation of deep wells generally damages the silicon substrate and increases the dark current of the pixels or leads. In RGB image sensors which use an isolation well, the well is passivated, for example by doping the silicon surface
    BE2017 / 5012 newly formed side walls and bottom of the box with p-type layouts. However, this
    is p â S U Ώ Θ L. -T Θ S good option in the frame of 1 a. present invention, being given that 1'i solation East Assumed increase the re s istance from traj and for of carrier : s majority between from s de r ovations, and this ei ref would be countered during what about box would be gifted because ί oo.
    doping would reduce the resistance of the box surface.
    However, other means of passivation can, be used, for example the box could, be covered with an insulator such as a thin oxide or a nitride or another insulator then filled with a conductive or semiconductor material, said box covered with insulation, and filled with the conductive or semiconductor material acting as a grid which can be olarized. The overlap with the insulation and the conductive or semi-polarized material influence. them since that. can. render it re mp 11 s a g e a v e c u c ο n du c t. e u r J surfaces of electrically inactive in minority carriers with same.
    pe;
    C ci .i. o ö O i avoiding an interaction of ia surfa.ee oe caisson sue -
    The detector device 300 of the present invention may include at least one additional isolation box region 150 formed at the rear side of the. semiconductor layer 106, as shown in Figure 4. The function of these additional isolation box regions 150 is to prevent more deeply penetrating light beams from entering adjacent pixel regions.
    BE2017 / 5012
    Checkout equipment:
    : elm es di
    m. r ·. H 1 T G · '’t T -! V r- *. -, x _ · 'x x Ll k_- L. tu Ll J- la; back side of the insulation layer 103, 150, the front side of the semi layer both in the front side and. in the semiconductor, may include deep isolation box regions and / or very deep isolation box regions.
    Preferably, the thickness of the semiconductor layer is suitable for back side lighting (BSI) and the detection region 101, 116, the control regions 100, 115 and the isolation means 103 are formed in the front side of the semiconductor layer 106,
    More preferably, a second source V b i as 111 is implemented in the detector device 300 to generate a second current of majority carriers 105 in the. semiconductor layer 106 between the front side and the rear side of the semiconductor layer 106, for example between at least control region 100, 115 formed in the front side of the semiconductor layer 106 and the side behind the semiconductor layer 106, said second current of majority carriers 105 is associated with a respective second cell. Minority holders generated:
    .t directed ve:
    the front side of the seed layer under influence> electrical ecc respectively associated with at least one second current of majority carriers 105.
    The detector backlog or aiso 30ί may include a passivation layer 107 formed on the rear side of the semiconductor layer 10 6 and which is doped with a dopant of the first type.
    BE2017 / 5012 conductivity, for example a p + 107 doped layer. This helps to diffuse the applied field using the source 111.
    Another possibility is to have a lightly doped epitaxial layer on top of a highly doped substrate. This substrate can then also be used to diffuse the voltage applied using the source 111 and could be thinned to reduce its thickness.
    The detector device 300 may further comprise at least one contact region 108 formed on the rear side of the semiconductor layer 10 6 and which is doped with a dopant of the first type of conductivity. The second majority carrier current 105 is generated by the second source 111 in the semiconductor layer 10 6 between the at least one control region 100, 115 formed in the front side of the semiconductor layer 106 and said contact region 108.
    Another way to contact the back side could be a deep p-well structure at the front side, deep enough to connect to the passivation layer 107. Therefore,
    it's pure P Ρθπ r θ r κ polaris é from front side and allows 1 .'appi cation and the. order of 1 'intensity of second field electric. So the layer of not if i go t: i ο n 10 7 may to be mid get in touch with the help of' a well pr of ond form in the front side of layer of
    s e m i - c ο n of the c u e 10 6.
    It should be understood that, even without implementing such elements 107, 108 and 111, the
    BE2017 / 5012 operation of the detector device 300 in a BSI configuration is possible, since an integrated electric field is generally present vertically in the device 300. These elements are possibly used to improve the second electric field.
    The sources voltage V S i X 1.10 and Vbias 11 rely on guidance fields in the 0 O 'c fr of semi c ο n the heart. V rai x is applied on pixels adj acent as shown, while Vbias 1 i have a delta d.
    voltage between the front side and the rear side of the semiconductor layer 106. These voltage sources 110 and 11 induce first majority currents 104 between the pixels, and majority carrier currents 105 of these carriers are connected towards dVdîi the rear, respectively. An electric field is induced in opposition to the current detection. When light reaches the semiconductor layer 106 from the rear side, electron-hole pairs 121 are generated. The holes flow with the induced majority current towards the rear side, while the electron is guided towards the front side. Once near the front side, the electron will be driven to the pixel with the most polarized p + scattering 100, where it will enter the adjacent nt scattering 101 and enter the pixel readout circuit 120 for processing additional. This circuit 120 can be a 3T, 4T or other pixel read circuit. The processing circuits 120 can be designed to sample a value linked to the charge of minority carriers collected by the detection regions and to process said value and deliver time of flight data.
    BE2017 / 5012
    The following invention also enables intelligent organization of pixel structures and allows for the improvement of data partitioning methods in DDT imagers. Partitioning is the aggregation of individual pixel information, generally to improve the signal-to-noise ratio of the compartmentalized information.
    The Figur · e 5 represents a family possible to signals to use over there. source Vndx 110 from: Figure 3. Although a beach any of ret ards of phase / time (in seconds or 0-360 °) and of form signal
    (sinusoidal, PRES, sawtooth, square, ...) can be used, we will use in this description square waves and combinations of phase delays of 0 ° / 90 ° / 180 ° / 270 °, used for signal n signal 0 is generally modulated light.
    Figure 6 shows a diagram on how to organize the pixel in a detector device, for example a DDT imager, a checkerboard pattern being used, applying phase shifted signals of 0 ° and 180 °. Pixels marked with a 0 are connected to a terminal of the source itO represenr.ee on ra tigure pixels marked with 180 are connected to In a typical operation, two takes: one with a phase delay of 0 then one with a measurement 90 phase shifted and
    3, while the other side.
    me s u r e s s ο n t and 180 degrees, 270 degrees.
    For a pixel, the operating area 200 is shown, which extends beyond an individual cell. This operating area is similar for all pixels in the array and results from field lines extending outside the pixel boundaries
    BE2017 / 5012 when close to the one shown in Figure 3.
    sensitive surface, such as
    Consequently, all the information acquired overlaps and is post-processed to calculate the data phase shifted by 0, 90, 180, 270 individual degrees. This is usually done using data from surrounding pixels in time and space, for example, by performing simple interpolation, using median or average values, or choosing combinations of data based on additional information, such as gradients / edges or detected movement.
    In conventional color sensors, similar concepts exist to obtain this, called demosaicing, where they are generally used to obtain: Red, Green, Blue data per pixel, as is known to those skilled in the art.
    Organizing a DDT imager in such a way allows all of the incident light to be used, since it is captured at all times in a detector node, but does not require a high number of leads in each pixel, which would require a larger pixel structure. This ability to configure the virtual pixel size is achieved by rearranging the electric fields in the CAPD as explained in this disclosure.
    It is also possible to design an image sensor comprising a plurality of detector devices, the image sensor being designed to implement an additional demosaicing step for
    BE2017 / 5012 calculate individual pixel data from the overlapping pixel data obtained.
    Another diagram is shown in Figure 7, where the data associated with 0, 90, 180, 270 degrees are obtained in parallel by driving the different 'Unix phase shifted signals to different pixels in the imager.
    In order to increase the rappo rt signal-on- noise, it is important to have mé c a η i s m e s f1e x ib1e s for compa r t. imen t e of s data from pixel together created ant one larger pixel. The device detector 300 from 1 to for in v e n t i ο n solve this specific problem, of the
    next way.
    The device detector 3 0 0 of invention can understand a plura bed of adj acent.es respectively associated this. U Γΐ Θ i means. .solation 103, 1 001, 10 02 located
    to deflect a plurality of firsts, the present deviation is a plurality of them, current of associated majority carriers 104. Each derivation may comprise at least one detection region and at least one control region. The detector device can also include control circuits designed to control the first source 110 and separate separately at least one of said first main deviated carrier currents 104.
    The control circuits can also be designed to temporally cancel at least one of said first currents of deviated majority carriers 104 by piloting the source Vmix 110 in an appropriate manner.
    BE2017 / 5012
    The control circuits can also be designed to reduce or eliminate the associated derivations participating in the detection of the minority carriers generated, as explained in the present invention below.
    Control circuits can also be designed to achieve pixel partitioning, such as
    explanation u e o ans r a present invention below. On the Figure 8, a diagram is represented, in which many D1X are placed in a No state Connec tee (= NC), bringing so the field lines at
    bypass the NC cells and be directed only to the remaining functioning cells. The incident light on the pixels in the NC state will then be distributed on the adjacent pixels which are connected to a V niix signal, Therefore, the functional pixel structure is enlarged to an operating area 202, similar to what would happen if pixels had been compartmentalized together, but requiring only one pixel to read.
    In practice, the NC state could, not be connected, but could also be minimally connected with a lower voltage or a different voltage. The objective of this state is to place two adjacent leads in a non-detection state by modifying a first current of associated majority carriers to allow the redirection of the minority carriers generated, here electrons, to the nearest detection region.
    BE2017 / 5012
    The state of non-detection of said two adjacent leads may be obtained by disconnecting their control regions such that the first ma - rity:
    associates (1 carrier current: eliminated. As a variant, the state of non-detection of said two adjacent branches can be obtained by connecting their control regions to a predetermined voltage so that the first associated majority carrier current (104) is reduced, the predetermined rei being less than u:
    are you there η ν '!
    used in a detection state, placing the pixel would not ciper, the in which i.l · oins signal, a range more;
    In other words, instead of in an NC state in which it does not leave a pixel, it can be placed in a state, would still participate, but would receive m This may dynamically wander advantageously to create or allow a robust ambient.
    As a variant, as shown in FIG. 6, the state of non-detection of two adjacent leads is obtained by modifying the polarity of the majority carrier current between said two adjacent leads.
    To better illustrate the concept, on. In Figure 9, an even larger pixel with an operating area 203 is obtained by placing more pixels in the NC state. Concretely, any form or structure of NC with respect to connected pixels can be produced, the light entering above the pixel structure NC being distributed equally over the surrounding connected pixels.
    BE2017 / 5012
    These compartmentalization states can be decided during 1 / execution by configuring pixels in the NC state, while others are maintained in f ο n c t i ο η n e me n t. c o mp a r t i me n t a g execution.
    This allows flexible res, approaches i gu r ab when
    The
    Figures 8 igurat is ae m "urç à 0 and represent c. 80 degrees. Obviously measurements at 90 and 270 degrees could be obtained again in subsequent measurements, or by configuring the pixel scheme to obtain it in parallel, as illustrated in Figure 7.
    In Figure 10, another embodiment of the detector device 300 of the present invention is shown. Figure 10 explains the practical implementation of DDT and data partitioning measures.
    A selector 160 is implemented to select the predetermined voltage V : illx to be applied to the control regions 115, thanks to the first source 110. Thanks to the
    selector 16many if 0, when c iu DDT operation of the device, .gnau x of different modulation can fa ire function the governed! ms via sour these Of voltage V m -i z 110 , to get the signals of correlation DDT. required s (e.g. 0 °, 90 °, 180 °, 270 °). In each pixe 1, .1 e selector 160 is implemented p our- to select 1 θ modulation signal driven to the region of comm .ande guide, or select the
    NC node, allowing the compartmenting operation as presented in Figures 8 and 9. If a memory element is present in each pixel to allow a
    BE2017 / 5012 pixel selection of the signal, arbitrary compartmentalization patterns can be implemented.
    When the lighting of specific areas can be turned on / off at runtime, a system could be constructed in which the lighting of specific areas is turned on / off in conjunction with the sensor areas that are turned on / off. One type of lighting that could achieve this is a V C S E L.
    In addition, certain areas in which light is only detected and not demodulated could be envisaged, by selecting a DC voltage (not shown). This allows the creation of a non-DDT mode of operation, attracting light in a bare way.
    In Figure 11, another embodiment of the detector device of the present invention is shown. An RVBZ implementation is shown, in which certain optical filters are applied on top of the front side or the back side of the semiconductor layer, depending on the FSI or BSI configuration, to only pass, for example, light Red + IR (represented by R in Figure 11), Green light + IR (represented by V in Figure 11), Blue light + IR (represented by B in Figure 11), light IB. (represented by D in Figure 11). At a later stage, or in parallel, the first source 110 is able to supply a direct current (DC) voltage. RGB and IR intensity data can thus be obtained by operating the device in non-DDT mode by applying DC voltages to the first source 110
    BE2017 / 5012
    Vinix. It might also be beneficial to be able to regularly read the RGB signals entering the front side. This could be achieved by applying DC voltages to the first 110 V ix source for each pixel, leading to only vertical fields. This helps to induce only vertical movement with respect to the electrons and to maintain the lateral position in which the electron-hole pair has been photogenerated. This then helps not to mix the electrons generated under the different filters that could be applied on top of each individual cell (Red, Green, Blue, IR, Red + IR, Green + IR, Blue + IR, ...) .
    BE2017 / 5012
    FIGURES
    h 1 rigure 1 Timing Generator Synchronization generator CPU Central processing unit FigureLight O-JLight Pixel c circuit pixel circuit Figure Zi4 Light Light
    Figure 5
    lime time Figure 10 Light Light Pixel c circuit Oixel circuit
    Figure 11
    R F < f-lBnot VBT>
    BE2017 / 5012
    权利要求:
    Claims (14)
    [1]
    RE CLAIMS
    1 - Device detector (300) assisted by shift current oritary for the detection of a radiation electromagnetic ethics understand unt: - a layer c ie semiconductor (106) on which u n radiation é 1 e c t r o m a gné t ic can. be
    incident to generate, therein, majority and minority carrier pairs (121) and which is doped with a dopant of a first type of c ο n of c t. i v i t. é;
    - at least two control regions (100, 115) formed in the semiconductor layer (106), which are doped with a dopant of the first type of conductivity;
    - a first source (110) for generating at least a first current of majority carriers (104) in the semiconductor layer (106) between said two control regions (100, 115), the first current of majority carriers (104 ) being, associated with a first
    field respective electric; ... at least one summer region ction (101, 116) formed clan s the semiconductor layer (106) and who is doped with a dopant of a second type c o n du c t .i v i t é opposite to P remier type of conductivity, to form a
    joining and collecting generated minority carriers;
    - the minority carriers being directed towards the detection region (101, 116) under the influence of the first electric field respectively associated with the at least one first current of majority carriers (104);
    the detector device being characterized in that:
    it further comprises insulation means (103, 1001, 1002), formed in the semiconductor layer (106) and located between said two first
    BE2017 / 5012 control regions (100, 115), to deflect the first majority carrier (104) generated by the source (110) between said two demand regions (100, 115).
    [2]
    2 - Detector device (300) according to.
    Claim 1, in which the insulation means (103, 1001, 1002) comprise at least one insulation box region (103, 1001, 1002).
    dream i τί fi η r · at:
    Detector device (300) according to 1 or 2, in which the thickness of the semiconductor cable (106) is adapted for:
    ecra:
    gec ô t é back,: t ms .e flood .ιτέα detection ion (101, 116), the control regions (100, 115) and the isolation means (103; 1001; 1002) are formed in the front side of the semiconductor layer (106).
    Di st citif iéte (300) according to me
    [3]
    3, further comprising any one of claims 1 a second source (111) for g <current of majority carriers (105) in semiconductor (106) between the c semiconductor (10 6) and the semiconductor side (106 ), said majority (105) being associated with a respective second electric field, the minority carriers generated being directed towards the front side of the semi layer (106) under the influence of the second field
    to me ms a dry have Q. ci I i S the layer of ant of the where of : re from the layer of flowing of door urs
    > C τί n p f η ν 'electrical respectively associated with at least:
    ui: ecc. r a n t of p o r t u r s ma. j o r i t a i r <.
    .05).
    Detector device (300) for the identification further comprising a layer of
    BE2017 / 5012 passivation (107) formed on the rear side of the semiconductor layer (106) and which is doped with a dopant of the first type of conductivity, the passivation layer (107) being brought into contact using a deep well formed in the front side of the semiconductor layer (106).
    [4]
    6 - detector device (300) according to any one of the preceding claims, further comprising a plurality of adjacent branches respectively associated with a plurality of isolation means (103, 1001, 1002) located between them to deflect a plurality of first associated majority carrier currents (104), each branch comprising at least one detection region and at least one control region; and further comprising control circuits adapted to control the first source (110) and separately control said first majority carrier currents (104) deflected by said isolation means (103, 1001, 1002).
    [5]
    7 - Device according to claim 6, wherein the control circuits are further designed to place two adjacent branches in a state of nondetection, by modifying a first current of associated majority carriers (104), to allow the redirection of minority carriers generated to the nearest detection region.
    [6]
    8 - Detector device (300) according to claim 7, wherein the state of non-detection of said two adjacent branches is obtained by disconnecting their control regions.
    BE2017 / 5012
    9 - Device detector (300) according to the r e v e n d i c a t i ο n z, da. ns le que : 1 state of non-detection. i ο n of said two derivations adj acentes is obtained in connecting the s regions of ordered at a tens i o predetermined, pre tension ^ determined being inferior Read
    at a voltage used in a detection state.
    [7]
    10 - Detector device (300) according to claim 7, in which the state of non-detection of said two adjacent branches is obtained by modifying the polarity of the current, of majority carriers between said two adjacent branches.
    [8]
    11 - Detector device (300) according to any one of claims 6 to 10, wherein, the control circuits are further designed to obtain a partitioning of pixels.
    [9]
    12 - Detector device (300) according to any one of the preceding claims, in which the isolation means (103, 1001, 1002) are polarized with a potential.
    [10]
    13 - Detector device (300) according to any one of the preceding claims, in which the insulation means (103, 1001, 1002) are a box covered with an insulator and then filled with a conductive or semiconductor material.
    [11]
    14 - Detector device (300) according to any one of the preceding claims, further comprising at least one other region of insulation box (150) formed in the rear side of the sowing layer (10 6).
    BE2017 / 5012
    [12]
    15 - Detector device (300) according to any one of claims 2 to 14, in which the isolation box regions (103, 1001, 1002; 150), formed in the front side of the semiconductor layer or both in the front side and in the rear side of the semiconductor layer (106), include deep isolation box regions and / or very deep isolation box regions.
    [13]
    16 - Detector device (300) according to any one of the preceding claims, further comprising processing circuits (120) designed to sample a value associated with the charge of minority carriers collected by the detection region (101, 116) and to process said value and deliver flight time data.
    [14]
    17 - Detector device (300) according to any one of the preceding claims, further comprising optical filters (R; G; R; D) on the top of the front side or the back side of the semi layer (10 6 )
    BE2017 / 5012
    Proud 1
    BE2017 / 5012
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    法律状态:
    2018-08-29| FG| Patent granted|Effective date: 20180702 |
    2018-08-29| HC| Change of name of the owners|Owner name: SONY DEPTHSENSING SOLUTIONS; BE Free format text: DETAILS ASSIGNMENT: CHANGE OF OWNER(S), CHANGEMENT DE NOM DU PROPRIETAIRE; FORMER OWNER NAME: SOFTKINETIC INTERNATIONAL Effective date: 20180703 |
    2018-08-29| PD| Change of ownership|Owner name: SOFTKINETIC INTERNATIONAL; BE Free format text: DETAILS ASSIGNMENT: CHANGE OF OWNER(S), FUSION; FORMER OWNER NAME: SOFTKINETIC SENSORS NV Effective date: 20180703 |
    优先权:
    申请号 | 申请日 | 专利标题
    EP16151583.8|2016-01-15|
    EP16151583.8A|EP3193369B1|2016-01-15|2016-01-15|A detector device with majority current and isolation means|
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